Design and Microfabrication of Innovated FBAW Filters Based on an OOK Receiver Using 0.18um CMOS Technology

Author

Fang, Chi-Ming ; Chen, Pei-Yen ; Chin, Yung-Chung ; Lin, Yu-Tso ; Wang, Xuan-Yu ; Lu, Shey-Shi ; Chang, Pei-Zen

Author_Institution

Inst. of Appl. Mech., Nat. Taiwan Univ., Taipei

fYear

2007

fDate

16-19 Jan. 2007

Firstpage

390

Lastpage

395

Abstract

This paper presents the design and microfabrication of innovated film bulk acoustic wave (FBAW) filters based on a low voltage low power on-off keying (OOK) miniaturized monolithic receiver using 0.18mum CMOS technology. FBAW filters have the potential to enable the fabrication of high quality filters integrated with RF CMOS circuitry on a chip. To match the specifications of OOK receiver, an 866MHz 167ohms FBAW filter would be implemented in this research to demonstrate the process compatibility between the FBAW filter and the 0.18mum CMOS standard IC. This integrated device could be used as part of a wireless local area sensor network, and helpful to integrate RF system into a single chip.

Keywords

acoustic receivers; acoustic resonator filters; amplitude shift keying; bulk acoustic wave devices; low-power electronics; 0.18 micron; CMOS technology; FBAW filters; OOK receiver; film bulk acoustic wave filters; film bulk acoustic wave resonator; low voltage low power on-off keying miniaturized monolithic receiver; systerm on a chip; Acoustic waves; CMOS integrated circuits; CMOS process; CMOS technology; Fabrication; Integrated circuit technology; Low voltage; Matched filters; Radio frequency; Wireless sensor networks; CMOS MEMS; Film Bulk Acoustic Wave Filter (FBAW Filter); Film Bulk Acoustic Wave Resonator (FBAR); Integration; RF Filter; Systerm on a chip (SOC);

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems, 2007. NEMS '07. 2nd IEEE International Conference on

Conference_Location

Bangkok

Print_ISBN

1-4244-0610-2

Type

conf

DOI

10.1109/NEMS.2007.352043

Filename

4160346