Title :
The Study of Flexible Plate Wave Device for Micro Pumping System
Author :
Tsai, Min-Chien ; Leu, Tzong-Shyng
Author_Institution :
Inst. of Aeronaut. & Astronaut., Nat. Cheng Kung Univ., Tainan
Abstract :
This paper investigates on micro pumping system, flow field generated by an traveling wave boundary layer, which model is developed for flexural plate wave (FPW) device numerically. In the study, the steady state solution of a FPW pump is most concerned. The velocity profiles and net flow rate for different parameters including frequency, channel height, and wave length are investigated. In this device, it is found that flow field remains periodic. The time averaged velocity profiles over one period become a parabolic velocity profile when the channel height is less than 100 mum. When a channel height is higher than 200jim, the time averaged velocity profiles deviate from parabolic velocity profile to a wall-jet type velocity profile. This finding is different from previous study. The acoustic pressure can influence as high as 100 Jim channel height. The pressure wave confinement effect in a microchannel with height less than 100 Jim is noticed. This research also finds that the flow rate of FPW pump can be controlled by the frequency.
Keywords :
elastic waves; micropumps; acoustic pressure; flexible plate wave device; micropumping system; net flow rate; parabolic velocity profile; pressure wave confinement effect; traveling wave boundary layer; Acoustic devices; Acoustic waves; Biomembranes; Boundary conditions; Frequency; Microchannel; Micropumps; Piezoelectric films; Pumps; Steady-state; acoustic streaming; flexural plate wave; micro channel; micro pump;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems, 2007. NEMS '07. 2nd IEEE International Conference on
Conference_Location :
Bangkok
Print_ISBN :
1-4244-0610-2
DOI :
10.1109/NEMS.2007.352057