• DocumentCode
    2419568
  • Title

    Nanoscale Cutting, Bending and Welding in a Nanoassembly

  • Author

    Fukuda, Toshio ; Liu, Pou ; Kantola, Kalle

  • Author_Institution
    Dept. of Micro-Nano Syst. Eng., Nagoya Univ.
  • fYear
    2007
  • fDate
    16-19 Jan. 2007
  • Firstpage
    548
  • Lastpage
    551
  • Abstract
    Carbon nanotube (CNT) can be used as a building block of nanoelectronic mechanical systems (NEMS). The main problems involved in nanotube based applications are related to the fabrication and assembly of the CNT. In this paper, in situ nanofabrication methods, involving cutting, bending, and welding of multi-walled carbon nanotube (MWNT) inside a scanning electron microscope (SEM), are presented. These three nanofabrication techniques are further used in the assembly of a CNT based nanostructure. A three dimensional (3D) nanostructure, the letter N, was assembled from a single CNT and fixed to stand on a substrate. Based on the high performance of the proposed techniques, it is suggested that the cutting, bending, and welding techniques inside SEM will become widely utilized in the fabrication and assembly of nanodevices and in the characterization of nanomaterials.
  • Keywords
    bending; carbon nanotubes; cutting; microassembling; micromechanical devices; nanoelectronics; nanotube devices; welding; multiwalled carbon nanotube; nanoassembly; nanodevices; nanoelectronic mechanical systems; nanofabrication; nanomaterials; nanorobotic manipulation; nanoscale bending; nanoscale cutting; nanoscale welding; nanostructures; scanning electron microscope; Assembly; Atomic force microscopy; Carbon nanotubes; Electron beams; Fabrication; Nanofabrication; Nanoscale devices; Scanning electron microscopy; Systems engineering and theory; Welding; carbon nanotubes; nanoassembly; nanofabrication; nanorobotic manipulation; nanostructures;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nano/Micro Engineered and Molecular Systems, 2007. NEMS '07. 2nd IEEE International Conference on
  • Conference_Location
    Bangkok
  • Print_ISBN
    1-4244-0610-2
  • Type

    conf

  • DOI
    10.1109/NEMS.2007.352078
  • Filename
    4160381