DocumentCode
2419568
Title
Nanoscale Cutting, Bending and Welding in a Nanoassembly
Author
Fukuda, Toshio ; Liu, Pou ; Kantola, Kalle
Author_Institution
Dept. of Micro-Nano Syst. Eng., Nagoya Univ.
fYear
2007
fDate
16-19 Jan. 2007
Firstpage
548
Lastpage
551
Abstract
Carbon nanotube (CNT) can be used as a building block of nanoelectronic mechanical systems (NEMS). The main problems involved in nanotube based applications are related to the fabrication and assembly of the CNT. In this paper, in situ nanofabrication methods, involving cutting, bending, and welding of multi-walled carbon nanotube (MWNT) inside a scanning electron microscope (SEM), are presented. These three nanofabrication techniques are further used in the assembly of a CNT based nanostructure. A three dimensional (3D) nanostructure, the letter N, was assembled from a single CNT and fixed to stand on a substrate. Based on the high performance of the proposed techniques, it is suggested that the cutting, bending, and welding techniques inside SEM will become widely utilized in the fabrication and assembly of nanodevices and in the characterization of nanomaterials.
Keywords
bending; carbon nanotubes; cutting; microassembling; micromechanical devices; nanoelectronics; nanotube devices; welding; multiwalled carbon nanotube; nanoassembly; nanodevices; nanoelectronic mechanical systems; nanofabrication; nanomaterials; nanorobotic manipulation; nanoscale bending; nanoscale cutting; nanoscale welding; nanostructures; scanning electron microscope; Assembly; Atomic force microscopy; Carbon nanotubes; Electron beams; Fabrication; Nanofabrication; Nanoscale devices; Scanning electron microscopy; Systems engineering and theory; Welding; carbon nanotubes; nanoassembly; nanofabrication; nanorobotic manipulation; nanostructures;
fLanguage
English
Publisher
ieee
Conference_Titel
Nano/Micro Engineered and Molecular Systems, 2007. NEMS '07. 2nd IEEE International Conference on
Conference_Location
Bangkok
Print_ISBN
1-4244-0610-2
Type
conf
DOI
10.1109/NEMS.2007.352078
Filename
4160381
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