Title :
CMOS MEMS Lorentz Force Dual-axis Scanning-Stage
Author :
Sun, Chih-Ming ; Wang, Chuan-Wei ; Fang, Weileun
Author_Institution :
MEMS Inst., Nat. Tsing Hua Univ., Hsinchu
Abstract :
This study presents a novel dual-axis CMOS MEMS scanning stage driven using the Lorentz force. The device has been successfully implemented using the TSMC 2P4M process. The current routing achieved by three metal layers enables the independent driving for each axis. The measurement results show that the device has resonant frequencies of 1.36KHz and 2.26KHz respectively for each axis.
Keywords :
CMOS integrated circuits; microactuators; micromirrors; 1.36 kHz; 2.26 kHz; CMOS MEMS Lorentz force dual-axis scanning-stage; CMOS process; Electrostatic actuators; Lorentz covariance; Magnetic field measurement; Magnetic fields; Microelectromechanical devices; Micromechanical devices; Monolithic integrated circuits; Routing; Wire;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems, 2007. NEMS '07. 2nd IEEE International Conference on
Conference_Location :
Bangkok
Print_ISBN :
1-4244-0610-2
DOI :
10.1109/NEMS.2007.352086
