DocumentCode
2419698
Title
CMOS MEMS Lorentz Force Dual-axis Scanning-Stage
Author
Sun, Chih-Ming ; Wang, Chuan-Wei ; Fang, Weileun
Author_Institution
MEMS Inst., Nat. Tsing Hua Univ., Hsinchu
fYear
2007
fDate
16-19 Jan. 2007
Firstpage
580
Lastpage
583
Abstract
This study presents a novel dual-axis CMOS MEMS scanning stage driven using the Lorentz force. The device has been successfully implemented using the TSMC 2P4M process. The current routing achieved by three metal layers enables the independent driving for each axis. The measurement results show that the device has resonant frequencies of 1.36KHz and 2.26KHz respectively for each axis.
Keywords
CMOS integrated circuits; microactuators; micromirrors; 1.36 kHz; 2.26 kHz; CMOS MEMS Lorentz force dual-axis scanning-stage; CMOS process; Electrostatic actuators; Lorentz covariance; Magnetic field measurement; Magnetic fields; Microelectromechanical devices; Micromechanical devices; Monolithic integrated circuits; Routing; Wire;
fLanguage
English
Publisher
ieee
Conference_Titel
Nano/Micro Engineered and Molecular Systems, 2007. NEMS '07. 2nd IEEE International Conference on
Conference_Location
Bangkok
Print_ISBN
1-4244-0610-2
Type
conf
DOI
10.1109/NEMS.2007.352086
Filename
4160389
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