Title :
Electrohydrodynamic (EHD) Micro-Boat
Author :
Wang, Jiun-Min ; Lin, Tzu-Yuan ; Yang, Lung-Jieh
Author_Institution :
Dept. of Mech. & Electro-Mech. Eng., Tamkang Univ., Tamsui
Abstract :
This paper describes about the fabrication and testing of a novel electrohydrodynamic (EHD) micro-boat using parylene MEMS technology. The driven force of micro-boat utilizes the reaction force of the EHD, with planar electrodes, to pump nonpolar liquid. As a result, by applying a DC voltage of 30-40 V the instantaneous moving velocity of the EHD micro-boat is about 6.5 mm/min.
Keywords :
electrohydrodynamics; micromechanical devices; 30 to 40 V; electrohydrodynamic micro-boat; parylene MEMS technology; planar electrodes; Conductivity; Electrodes; Electrohydrodynamics; Fabrication; Micromechanical devices; Micropumps; System testing; Systems engineering and theory; Thickness control; Voltage; electrohydrodynamic (EHD); micro-boat; parylene;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems, 2007. NEMS '07. 2nd IEEE International Conference on
Conference_Location :
Bangkok
Print_ISBN :
1-4244-0610-2
DOI :
10.1109/NEMS.2007.352087
