DocumentCode
2420122
Title
InP Ring-like Nanostructures on Ino.49Gao.51P Grown by Droplet Epitaxy
Author
Jewasuwan, Wipakom ; Panyakeow, Somsak ; Ratanathammaphan, Somchai
Author_Institution
Dept. of Electr. Eng., Chulalongkorn Univ., Bankok
fYear
2007
fDate
16-19 Jan. 2007
Firstpage
668
Lastpage
671
Abstract
The authors have successfully fabricated self-assembled InP ring-like nanostructures on lattice-matched In0.49 Ga0.51P on GaAs substrates by solid-source molecular-beam epitaxy using droplet epitaxy technique. The growth sequence is initiated by indium deposition which was intended to form indium droplets and followed by exposure P2 beam to crystallize the indium droplets to InP. Dependence of the surface morphology on the indium thickness and substrate temperature was investigated. It is observed that the ring-shape nanostructure is formed when indium thickness is 1.6 ML and the ring shape and the ring-like quantum-dot molecule is formed when the indium thickness is thicker than 1.6 ML. The ring-like nanostructure is formed when indium deposition at 120degC and the ring shape and the ring-like quantum-dot molecule is formed when indium deposition at 150degC or higher. The density, height and number of dot per molecule of ring-shape nanostructure also depended on the indium thickness and on the substrate temperature while indium deposition.
Keywords
epitaxial growth; gallium arsenide; indium compounds; molecular beam epitaxial growth; nanotechnology; self-assembly; semiconductor growth; surface morphology; 120 C; 150 C; In0.49Ga0.51P; InP; droplet epitaxy; nanotechnology; ring-like quantum-dot molecule; self-assembled ring-like nanostructures; semiconductor growth; solid-source molecular-beam epitaxy; substrate temperature; surface morphology; Epitaxial growth; Gallium arsenide; Indium phosphide; Molecular beam epitaxial growth; Nanostructures; Quantum dots; Self-assembly; Shape; Substrates; Temperature dependence; Gallium compounds; Indium compounds; Nanotechnology; Semiconductor growth;
fLanguage
English
Publisher
ieee
Conference_Titel
Nano/Micro Engineered and Molecular Systems, 2007. NEMS '07. 2nd IEEE International Conference on
Conference_Location
Bangkok
Print_ISBN
1-4244-0610-2
Type
conf
DOI
10.1109/NEMS.2007.352107
Filename
4160410
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