DocumentCode :
2420151
Title :
Precision Electron Beam Microfabrication of Acoustic Surface Wave Devices
Author :
Wolf, E.D. ; Ozdemir, F.S. ; Weglein, R.D.
fYear :
1973
fDate :
1973
Firstpage :
510
Lastpage :
516
Keywords :
Acoustic devices; Electrodes; Electron beams; Fabrication; Microwave filters; Optical filters; Optical surface waves; Surface acoustic wave devices; Surface acoustic waves; Transducers;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
1973 Ultrasonics Symposium
Type :
conf
DOI :
10.1109/ULTSYM.1973.196254
Filename :
1533194
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2420151
بازگشت