Title :
Fabrication of Microwave-Frequency Surface-Acoustic-Wave Transducers Using a Novel Electron-Beam Projection System
Author :
Lee, R.E. ; Westerberg, E.R. ; Bahr, A.J.
Keywords :
Acoustic transducers; Apertures; Charge carrier processes; Electron beams; Fabrication; Lenses; Microwave frequencies; Optical surface waves; Resists; Scanning electron microscopy;
Conference_Titel :
1973 Ultrasonics Symposium
DOI :
10.1109/ULTSYM.1973.196255
