Title :
Ion-Beam Etching of Surface Gratings
Author :
Smith, Henry I. ; Melngailis, John ; Williamson, R.C. ; Brogan, W.T.
Keywords :
Atomic layer deposition; Gratings; Integrated optics; Optical films; Optical surface waves; Solids; Sputter etching; Sputtering; Substrates; Surface acoustic waves;
Conference_Titel :
1973 Ultrasonics Symposium
DOI :
10.1109/ULTSYM.1973.196266
