DocumentCode
2420378
Title
Ion-Beam Etching of Surface Gratings
Author
Smith, Henry I. ; Melngailis, John ; Williamson, R.C. ; Brogan, W.T.
fYear
1973
fDate
1973
Firstpage
558
Lastpage
563
Keywords
Atomic layer deposition; Gratings; Integrated optics; Optical films; Optical surface waves; Solids; Sputter etching; Sputtering; Substrates; Surface acoustic waves;
fLanguage
English
Publisher
ieee
Conference_Titel
1973 Ultrasonics Symposium
Type
conf
DOI
10.1109/ULTSYM.1973.196266
Filename
1533206
Link To Document