Title :
Development of an Innovative Micro Capacitive Humidity Sensor With Double Polyimide Films and Interlacing Out-of-plane Electrodes Structure
Author :
Huang, I-Yu ; Lee, Yao-Yu ; Lin, Chang-Yu
Author_Institution :
Dept. of Electr. Eng., Nat. Sun Yat-Sen Univ.
Abstract :
This paper presents the design, fabrication and complete characterization of an innovative capacitive relative humidity (%RH) microsensor. The double polyimide (PI) thin films adopted in this study function as a humidity sensing layer and a protecting layer of top electrodes respectively. To improve the humidity sensitivity and responding speed, interlacing out-of-plane electrodes are designed in the RH microsensor. The very low hysteresis (0.24 %RH), high sensitivity (1.25 pF/%RH), high accuracy (plusmn1.12 %RH) and fast response (within 1 second) characteristics of the RH microsensor have been demonstrated in this research.
Keywords :
electrodes; humidity sensors; microsensors; thin films; double polyimide thin films; humidity sensing layer; humidity sensitivity; microcapacitive humidity sensor; microsensor; Capacitive sensors; Electrodes; Fabrication; Humidity; Hysteresis; Microsensors; Polyimides; Protection; Sensor phenomena and characterization; Transistors; Polyimide; capacitive %RH microsensor; humidity;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems, 2007. NEMS '07. 2nd IEEE International Conference on
Conference_Location :
Bangkok
Print_ISBN :
1-4244-0610-2
DOI :
10.1109/NEMS.2007.352125
