Title :
Novel RF CMOS symmetric inductor with stacked multi layer/finger structure
Author :
Jen-Hao Cheng ; Waisum Wong ; Xi-Ning Wang ; Zhenghao Gan ; Yun Yue ; Ling Liu ; Lin Zhong
Author_Institution :
Technol. R&D Center, Semicond. Manuf. Int. Corp., Shanghai, China
Abstract :
A symmetrical inductor structure has been developed and optimized using multi-layer and multi-finger stacked configuration. The new design improves the Q factor by 8% and reduces the die area by 30% for the same inductance compared to the typical planar differential inductor. Excellent symmetric performance of Q11/Q22 and L11/L22 has also been demonstrated while the series resistance and substrate parasitic capacitance has been greatly reduced.
Keywords :
CMOS integrated circuits; inductors; integrated circuit design; radiofrequency integrated circuits; Q factor; RF CMOS symmetric inductor structure; multi-fmger stacked configuration; multi-layer stacked configuration; planar differential inductor; series resistance; substrate parasitic capacitance; Abstracts; Coils; Fingers; Inductors; Integrated circuits; Read only memory;
Conference_Titel :
Solid-State and Integrated Circuit Technology (ICSICT), 2014 12th IEEE International Conference on
Conference_Location :
Guilin
Print_ISBN :
978-1-4799-3296-2
DOI :
10.1109/ICSICT.2014.7021471
