A Study on Theoretical Nano Forces in AFM Based Nanonmanipulation

As it is important to understand the basic mechanics principle in nanofabrication process, much research has been done about nano mechanics with different tools in different nano enviroments, and various kinds of nano force formula have been proposed. However, as the special case of AFM based nanomanipulation is considered, little about its mechanics principle under the micro probe´s operation is known, such as what kinds of nano forces are the decisive factors and how they work, which are important to perform accurate control in nanomanipulation. To explore this subject, nano forces among tip, substrate and particle are analyzed, and simulation & experiments are performed to verify the rationality of the analysis.