Title :
Accurate prediction of IC manufacturing distributions using improved response surface fitting
Author :
Nilsen, V.K. ; Walton, A.J.
Author_Institution :
Dept. of Electron. & Electr. Eng., Edinburgh Univ., UK
Abstract :
This paper presents an improved method of generating response distributions by using a covariance fit for the surfaces, enabling manufacturing distributions to be more accurately predicted. Response surfaces and distributions are compared for covariance and polynomial models for both a known response and for actual simulation data and the improvements in the predicted distributions highlighted
Keywords :
covariance analysis; integrated circuit manufacture; integrated circuit modelling; polynomials; IC manufacturing distributions; covariance fit; covariance models; manufacturing distributions; polynomial models; response distributions; response surface fitting; simulation data; Design for experiments; Equations; Polynomials; Power generation; Predictive models; Pulp manufacturing; Response surface methodology; Surface fitting; Virtual manufacturing;
Conference_Titel :
Statistical Metrology, 2000 5th International Workshop on
Conference_Location :
Honolulu, HI
Print_ISBN :
0-7803-5896-1
DOI :
10.1109/IWSTM.2000.869301
