Title :
Statistical simulation, calibration and analysis of 0.25 CMOS technology
Author :
Dong, Jeffrey ; Belova, Naciya ; Aronowitz, Sheldon
Author_Institution :
LSI Logic Co., Santa Clara, CA, USA
Abstract :
A statistical simulation flow for the characterization and analysis of 0.25 CMOS technology is presented. The simulation tools PDFAB, Tsuprem4 and Medici were used in this work. The simulation tools were calibrated to the Etest data and their capability to predict were verified. The statistical input parameters were collected from actual manufacturing distributions. Simulation results showed very good agreement with the manufacturing data
Keywords :
CMOS integrated circuits; calibration; integrated circuit manufacture; integrated circuit modelling; integrated circuit testing; statistical analysis; 0.25 mum; CMOS technology; E-test data; Medici; PDFAB; Tsuprem4; calibration; manufacturing distributions; simulation tools; statistical input parameters; statistical simulation; statistical simulation flow; Analytical models; CMOS technology; Calibration; Doping profiles; MOS devices; Medical simulation; Predictive models; Testing; Two dimensional displays; Virtual manufacturing;
Conference_Titel :
Statistical Metrology, 2000 5th International Workshop on
Conference_Location :
Honolulu, HI
Print_ISBN :
0-7803-5896-1
DOI :
10.1109/IWSTM.2000.869311
