Spray pyrolysis deposition for gas sensor integration in the backend of standard CMOS processes

Gas sensors are based on metal oxides, which likely will have a considerable impact on future smart phones, are analyzed by means of simulations. The deposition of a thin tin oxide film at the backend of a CMOS process has enabled the manufacture of integrated gas sensors. A spray pyrolysis technique is implemented for the deposition step, resulting in a thin tin oxide layer with good step coverage and uniformity. A simulation approach for spray pyrolysis deposition is presented, along with a discussion of the gas sensor operation. A sample model for H₂ detection is suggested, while our research serves as a step to link the simulation of gas-sensitive material deposition and gas sensor operation.