مرکز منطقه ای اطلاع رساني علوم و فناوري

DocumentCode :

2421713

Title :

Aluminum Nitride on Sapphire

Author :

Lakin, K.M. ; Liu, J. ; Wang, K.

fYear :

1974

fDate :

1974

Firstpage :

302

Lastpage :

306

Keywords :

Acoustic propagation; Acoustic waves; Aluminum nitride; Chemicals; Epitaxial growth; Semiconductor films; Substrates; Surface acoustic wave devices; Surface morphology; Temperature;

fLanguage :

English

Publisher :

ieee

Conference_Titel :

1974 Ultrasonics Symposium

Type :

conf

DOI :

10.1109/ULTSYM.1974.196341

Filename :

1533281

Link To Document :

https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2421713