DocumentCode
2422322
Title
Piezoelectric micropump with microvalves
Author
Smits, Jan G.
Author_Institution
Dept. of Electr., Comput. & Syst. Eng., Boston Univ., MA, USA
fYear
1989
fDate
12-14 Jun 1989
Firstpage
92
Lastpage
94
Abstract
A silicon micropump, provided with piezoelectric valves, which can be manufactured by established integrated circuit techniques, is described. The micropump can be used to pump liquids or gases at a very low rate, which can be accurately prescribed. The body of the pump and the valves are made of silicon and glass, and contain piezoelectric material which allows opening and closing the valves electrically. Pumping speeds up to 3 μl/min were shown to be feasible and a pressure of 60 cm of water could be achieved
Keywords
piezoelectric devices; pumps; valves; Si; integrated circuit techniques; micropump; microvalves; piezoelectric material; piezoelectric valves; pressure; pumping speeds; Computer aided manufacturing; Coolants; Drugs; Insulin; Micropumps; Microvalves; Piezoelectric materials; Silicon; Valves; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
University/Government/Industry Microelectronics Symposium, 1989. Proceedings., Eighth
Conference_Location
Westborough, MA
ISSN
0749-6877
Type
conf
DOI
10.1109/UGIM.1989.37309
Filename
37309
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