DocumentCode
2422385
Title
Care and feeding of a university cleanroom facility
Author
Runkle, G.A. ; Blondell, S.P. ; Fuller, L.F. ; Lane, R.L. ; Pearson, R.E. ; Smith, B.W. ; Turkham, I.R. ; Hesler, K.H. ; Kurinec, S.K.
Author_Institution
Dept. of Microelectron. Eng., Rochester Inst. of Technol., NY, USA
fYear
1989
fDate
12-14 Jun 1989
Firstpage
105
Lastpage
107
Abstract
The authors describe the systems that have been established for the operation of the microelectronics facility at the Rochester Institute of Technology. Attention is given to the organizational structure; support facilities; cleanroom maintenance; lab equipment; equipment operation; lab supplies, inventory, and control; lab safety; and the hazardous waste program
Keywords
laboratory apparatus and techniques; safety; semiconductor technology; Rochester Institute of Technology; hazardous waste program; inventory; lab equipment; lab supplies; maintenance; microelectronics facility; organizational structure; safety; support facilities; university cleanroom facility; Contracts; Costs; Engineering management; Laboratories; Maintenance engineering; Microelectronics; Personnel; Safety; Space technology; Temperature measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
University/Government/Industry Microelectronics Symposium, 1989. Proceedings., Eighth
Conference_Location
Westborough, MA
ISSN
0749-6877
Type
conf
DOI
10.1109/UGIM.1989.37314
Filename
37314
Link To Document