Title :
SU-8 Buckled-type Microvalves Switched by Surface Tension Forces
Author :
Yang, Lung-Jieh ; Liu, Kuan-Chun
Author_Institution :
Dept. of Mech. & Electro-Mech. Eng., Tamkang Univ., Tamsui
Abstract :
This paper presents the design, the fabrication, and the measurement result of a novel buckled-type microvalve. This device comprises of a parylene microtube for liquid transportation and a peacock-like SU-8 capillary microstructure for switching the microvalve without external power source. The maximal spreading angles of the peacock-like structures actuated by water surface tension are experimentally tested as 204deg and 15deg for the cases of not integrating and integrating a parylene microtube, respectively.
Keywords :
microvalves; surface tension; SU-8 buckled-type microvalves; parylene microtube; surface tension forces; water surface tension; Actuators; Design engineering; Fabrication; Geometry; Microstructure; Microvalves; Pumps; Surface tension; Testing; Valves;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems, 2007. NEMS '07. 2nd IEEE International Conference on
Conference_Location :
Bangkok
Print_ISBN :
1-4244-0610-2
DOI :
10.1109/NEMS.2007.352238
