Is micromechanics becoming a new subject for academic courses, or the design of a piezoelectric on silicon microrobot

A description is given of microrobotics design and research conducted with a group of students. A piezoelectric motor unit has been designed, which consists of a pair of silicon or polysilicon cantilever beams, on the top surfaces of which a piezoelectric film has been deposited, and the free tips of which are connected by a structure that allows this pair of beams to walk or, if the structure is restrained, to exert force. This force can be used to drive a circular gear or linear slider structure. This motor unit is expected to be able to provide an alternative to the electrostatic motor for the generation of motion in a micromechanical assembly. Detailed designs of micromotors and instruments are presented; details of microrobots which can make insectlike or caterpillarlike movements are shown; and a numerical analysis of their expected performance is given. Possible applications of micromotors are also discussed