DocumentCode
2423284
Title
Peeling and Cutting a Multi-Walled Carbon Nanotube inside a Scanning Electron Microscope
Author
Liu, Pou ; Kantola, Kalle ; Fukuda, Toshio ; Nakajima, Masahiro ; Arai, Fumihito
Author_Institution
Dept. of Micro-Nano Syst. Eng., Nagoya Univ.
fYear
2007
fDate
16-19 Jan. 2007
Firstpage
286
Lastpage
289
Abstract
Carbon nanotube (CNT) has many superior properties if compared to other materials which make it a promising nanostructure to be used in various nanoelectronic and mechanical systems (NEMS). The main problems involved in nanotube based applications are related to the fabrication process and especially to the machining and assembly of CNTs. In this paper, the techniques for peeling and cutting of multi-walled carbon nanotube (MWNT) are presented. Both the techniques take place inside the same observation devise a scanning electron microscope (SEM), which make the combination of the techniques effective. Also the size of the specimen chamber of a SEM enables the use of different fabrication methods like the assistance of a nanorobotic manipulator in different nanomanufacturing steps. The usability of the proposed techniques is verified in the manufacturing of a concept of one dimensional nanoactuator, which can be fabricated by the presented techniques.
Keywords
actuators; carbon nanotubes; cutting; machining; micromanipulators; nanotechnology; scanning electron microscopy; CNT assembly; CNT machining; SEM; multiwalled carbon nanotube cutting; multiwalled carbon nanotube peeling; nanomanufacturing steps; nanorobotic manipulator; one dimensional nanoactuator; scanning electron microscope; specimen chamber; Assembly; Carbon nanotubes; Fabrication; Machining; Mechanical factors; Mechanical systems; Nanoelectromechanical systems; Nanostructured materials; Organic materials; Scanning electron microscopy; carbon nanotubes; cutting; nanodevices; nanorobotic manipulator; peeling;
fLanguage
English
Publisher
ieee
Conference_Titel
Nano/Micro Engineered and Molecular Systems, 2007. NEMS '07. 2nd IEEE International Conference on
Conference_Location
Bangkok
Print_ISBN
1-4244-0610-2
Type
conf
DOI
10.1109/NEMS.2007.352028
Filename
4160586
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