Title :
IntelliSuite® EMagAnalysis: an S-parameter Extraction Tool for Real Deformed Structures
Author :
Xu, Fan ; Zhang, Shan-Liang ; Zhou, Lei ; Xu, Bo
Author_Institution :
IntelliSense Corp.
Abstract :
This paper discusses the method to extract s-parameters of real deformed MEMS devices with the combination of IntelliSuitereg EMagAnalysis and IntelliSuitereg TEMAnalysis, and the use of the data structure compatibility of these two analysis modules. Through this novel method that has been developed, more accurate results are gotten when analyzing a classical structure of RF switch.
Keywords :
S-parameters; electronic engineering computing; microswitches; FEM; IntelliSuite EMagAnalysis; IntelliSuite TEMAnalysis; MEMS devices; RF switch; data structure compatibility; deformed structures; s-parameter extraction tool; Analytical models; Computational modeling; Data mining; Deformable models; Dielectrics; Microelectromechanical devices; Radio frequency; Radiofrequency microelectromechanical systems; Scattering parameters; Switches; FEM; MEMS; RF switch; S-parameter;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems, 2007. NEMS '07. 2nd IEEE International Conference on
Conference_Location :
Bangkok
Print_ISBN :
1-4244-0610-2
DOI :
10.1109/NEMS.2007.352031
