• DocumentCode
    2423341
  • Title

    IntelliSuite® EMagAnalysis: an S-parameter Extraction Tool for Real Deformed Structures

  • Author

    Xu, Fan ; Zhang, Shan-Liang ; Zhou, Lei ; Xu, Bo

  • Author_Institution
    IntelliSense Corp.
  • fYear
    2007
  • fDate
    16-19 Jan. 2007
  • Firstpage
    299
  • Lastpage
    302
  • Abstract
    This paper discusses the method to extract s-parameters of real deformed MEMS devices with the combination of IntelliSuitereg EMagAnalysis and IntelliSuitereg TEMAnalysis, and the use of the data structure compatibility of these two analysis modules. Through this novel method that has been developed, more accurate results are gotten when analyzing a classical structure of RF switch.
  • Keywords
    S-parameters; electronic engineering computing; microswitches; FEM; IntelliSuite EMagAnalysis; IntelliSuite TEMAnalysis; MEMS devices; RF switch; data structure compatibility; deformed structures; s-parameter extraction tool; Analytical models; Computational modeling; Data mining; Deformable models; Dielectrics; Microelectromechanical devices; Radio frequency; Radiofrequency microelectromechanical systems; Scattering parameters; Switches; FEM; MEMS; RF switch; S-parameter;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nano/Micro Engineered and Molecular Systems, 2007. NEMS '07. 2nd IEEE International Conference on
  • Conference_Location
    Bangkok
  • Print_ISBN
    1-4244-0610-2
  • Type

    conf

  • DOI
    10.1109/NEMS.2007.352031
  • Filename
    4160589
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2423341