Title :
The study on metal-insulator-metal capacitor performance improvement
Author :
Po Li ; Jingwei Peng ; Zhang, David Wei
Author_Institution :
Dept. of Microelectron., Fudan Univ., Shanghai, China
Abstract :
Metal-insulator-metal capacitor (MIMc) is one of key components in mixed signal (MS) and radio frequency (RF) circuit due to its high performance. In this work, we studied MIMc dielectric, bottom/top plate materials, thickness influence on mismatch, voltage coefficient and temperature coefficient; then a near zero voltage and temperature coefficient stacked MIMc structure was proposed and demonstrated for the first time.
Keywords :
MIM devices; capacitors; mixed analogue-digital integrated circuits; radiofrequency integrated circuits; metal-insulator-metal capacitor; mixed signal circuit; radiofrequency circuit; Abstracts; CMOS integrated circuits; Capacitance; Process control; Radio frequency; Tin; Very large scale integration;
Conference_Titel :
Solid-State and Integrated Circuit Technology (ICSICT), 2014 12th IEEE International Conference on
Conference_Location :
Guilin
Print_ISBN :
978-1-4799-3296-2
DOI :
10.1109/ICSICT.2014.7021618
