Injector linac for Super-ALIS

Author

Hosokawa, T. ; Kitayama, T. ; Hayasaka, T. ; Ido, S. ; Uno, Y. ; Shibayama, A. ; Nakata, J. ; Nishimura, K. ; Nakajima, M.

Author_Institution

NTT Corp., Kanagawa, Japan

fYear

1989

fDate

20-23 Mar 1989

Firstpage

1459

Abstract

An injector linac is described for Super-ALIS, the dedicated superconducting storage ring for X-ray lithography at NTT LSI Laboratories. Super-ALIS uses a low-energy injection scheme which requires the injection efficiency to be raised, since stacking is unavailable due to the low injection energy levels. Improving the efficiency of the injector required a large current, low transverse emittance, and a narrow energy spread; a low-emittance electron gun, double prebunchers, standing-wave accelerator cavities, and an energy compression system were used in the injector to fulfil these strict requirements. The characteristics of the system are summarized; acceleration frequency is 2856.65 HMz; beam energy and current are 15 MeV and 270 mA, respectively; beam energy spread is 1% (FW); beam pulse width is 2 μs; and the maximum repetition rate is 3 Hz

Keywords

linear accelerators; storage rings; Super-ALIS; X-ray lithography; acceleration frequency; beam pulse width; double prebunchers; energy compression system; injection energy levels; injector linac; low-emittance electron gun; maximum repetition rate; narrow energy spread; standing-wave accelerator cavities; superconducting storage ring; transverse emittance; Electron accelerators; Electron emission; Energy states; Laboratories; Large scale integration; Linear particle accelerator; Particle beams; Stacking; Storage rings; X-ray lithography;

fLanguage

English

Publisher

ieee

Conference_Titel

Particle Accelerator Conference, 1989. Accelerator Science and Technology., Proceedings of the 1989 IEEE

Conference_Location

Chicago, IL

Type

conf

DOI

10.1109/PAC.1989.73479

Filename

73479