Title :
Design of a high-linear mems pressure sensor available for TPMS
Author :
Jian Zhang ; Jie Zhang ; Haochen Qi ; Zhiwen Hu
Author_Institution :
Sch. of Electron. Sci. &Appl. Phys., Hefei Univ. of Technol., Hefei, China
Abstract :
A capacitive MEMS pressure sensor with high linearity is presented, which is based on a fixed spherical cap electrode and a multiple-layered membrane. In this sensor, the touch process of electrodes starts at the beginning of measuring range, and a hole-shape structure made by DRIE is added. The device can enable a good linearity during the whole measuring range. The analysis of touch status and linearity is performed, so that the novel structure is verified to be effective. Further more, the fabrication process of this sensor is proposed and introduced. This high-linear MEMS pressure sensor can provide a good choice to tire pressure monitoring system (TPMS), which will work at the press range of 100KPa to 800KPa.
Keywords :
capacitive sensors; membranes; microfabrication; microsensors; pressure measurement; pressure sensors; sputter etching; tyres; DRlE; TPMS; fabrication process; fixed spherical cap electrode; hole shape structure; linear capacitive MEMS pressure sensor; multiple layered membrane; pressure 100 kPa to 800 kPa; tire pressure monitoring system; touch process; Abstracts; Electrodes; Micromechanical devices; Monitoring; Piezoresistance; Silicon; Software;
Conference_Titel :
Solid-State and Integrated Circuit Technology (ICSICT), 2014 12th IEEE International Conference on
Conference_Location :
Guilin
Print_ISBN :
978-1-4799-3296-2
DOI :
10.1109/ICSICT.2014.7021637
