Title :
The CeO2 sensing membrane in electrolyte-insulator-semiconductor for bio-sensor applications
Author :
Che Chun Liu ; Ming Ling Lee ; Kow Ming Chang ; Shan Wei Chang ; Hsiang Chen ; Chyuan Haur Kao ; Wei Kung Sung ; Min Hau Kuo ; Che Wei Chang ; Chia Lun Chang ; Chun Fu Lin
Author_Institution :
Dept. of Electron. Eng., Chang Gung Univ., Taoyuan, Taiwan
Abstract :
In the paper, the EIS structure with high-k CeO2 sensing film has more responsive to H+ relative to Na+ and K+. The CeO2 sensing membrane annealed with O2 at 800°C shows a higher sensitivity of 58.76 mV/pH, higher linearity, lower hysteresis voltage of 5.97 mV and lower drift rate of 0.96 mV/hr than the other conditions.
Keywords :
annealing; biological techniques; biomedical measurement; cerium compounds; chemical sensors; electrolytes; high-k dielectric thin films; pH; pH measurement; semiconductor-insulator boundaries; sputter deposition; CeO2; EIS structure; K+; Na+; O2; biosensor application; cerium oxide sensing membrane; electrolyte-insulator-semiconductor; high-k cerium oxide sensing film; hysteresis voltage; temperature 800 degC; voltage 5.97 mV; Annealing; Biomembranes; Films; Printed circuits; Process control; Standards;
Conference_Titel :
Solid-State and Integrated Circuit Technology (ICSICT), 2014 12th IEEE International Conference on
Conference_Location :
Guilin
Print_ISBN :
978-1-4799-3296-2
DOI :
10.1109/ICSICT.2014.7021639
