Title :
Stablity research and application of amorphous indium gallium zinc oxide tfts for active matrix organic light-emitting diode display
Author :
Feilong Zhao ; Dedong Han ; Junchen Dong ; Longyan Wang ; Nannan Zhao ; Yingying Cong ; Zhuofa Chen ; Xing Zhang ; Shengdong Zhang ; Yi Wang
Author_Institution :
Shenzhen Grad. Sch., Peking Univ., Shenzhen, China
Abstract :
High stability amorphous indium gallium zinc oxide (a-IGZO) thin-film transistors (TFTs) were fabricated on glass substrate without post annealing. The fabrication process and the stability of back channel etched (BCE) bottom gate a-IGZO TFTs on glass were proposed in detail. We studied the stability of the a-IGZO TFTs are subjected to the negative and positive gate bias stress. The threshold voltage (VTH) shift ΔVTH =-1.93V after 2000s negative gate bias stress. The ΔVTH =0.63V after 2000s positive gate bias stress. The threshold voltage shift of the TFT after 2.5×104s of constant bias stress (VGS = 20V, VDS = 5V) is as small as 1.3V. Furthermore, a negligible small amount of continuous drain current degradation over the entire constant voltage bias stress duration was observed. A 4.3×5.7cm2 active matrix organic light-emitting diode (AMOLED) panel driven by the a-IGZO TFTs with conventional two transistors and one capacitor (2T1C) pixel circuit was successfully fabricated.
Keywords :
III-V semiconductors; annealing; etching; gallium compounds; indium compounds; organic light emitting diodes; thin film transistors; wide band gap semiconductors; zinc compounds; AMOLED; BCE; InGaZnO; a-IGZO TFT; active matrix organic light-emitting diode display; back channel etched; drain current degradation; gate bias stress; glass substrate; post annealing; thin-film transistors; Abstracts; Active matrix organic light emitting diodes; Gallium; Indium; Lithography; Performance evaluation; Stress;
Conference_Titel :
Solid-State and Integrated Circuit Technology (ICSICT), 2014 12th IEEE International Conference on
Conference_Location :
Guilin
Print_ISBN :
978-1-4799-3296-2
DOI :
10.1109/ICSICT.2014.7021640