Title :
Influence of the Silicon Electrical Conductivity and a DC-Bias Voltage on the Excitation of Acoustic Surface Waves in the Three-Layer Substrate CdS-SiO2-Si
Keywords :
Acoustic transducers; Admittance measurement; Capacitance; Conductivity; Delay lines; Piezoelectric transducers; Silicon on insulator technology; Substrates; Surface acoustic waves; Voltage;
Conference_Titel :
1975 Ultrasonics Symposium
Conference_Location :
Los Angeles, CA, USA
DOI :
10.1109/ULTSYM.1975.196506