DocumentCode
2424487
Title
Evaluation of AlN Films on Sapphire for Surface Acoustic Wave Applications
Author
Liu, J.K. ; Stokes, R.B. ; Lakin, K.M.
fYear
1975
fDate
1975
Firstpage
234
Lastpage
237
Keywords
Acoustic measurements; Acoustic waves; Lattices; Pollution measurement; Strain measurement; Surface acoustic waves; Surface morphology; Thickness measurement; Velocity measurement; Wavelength measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
1975 Ultrasonics Symposium
Type
conf
DOI
10.1109/ULTSYM.1975.196507
Filename
1533447
Link To Document