DocumentCode :
2424487
Title :
Evaluation of AlN Films on Sapphire for Surface Acoustic Wave Applications
Author :
Liu, J.K. ; Stokes, R.B. ; Lakin, K.M.
fYear :
1975
fDate :
1975
Firstpage :
234
Lastpage :
237
Keywords :
Acoustic measurements; Acoustic waves; Lattices; Pollution measurement; Strain measurement; Surface acoustic waves; Surface morphology; Thickness measurement; Velocity measurement; Wavelength measurement;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
1975 Ultrasonics Symposium
Type :
conf
DOI :
10.1109/ULTSYM.1975.196507
Filename :
1533447
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2424487
بازگشت