Title :
Development of linear actuator for positioning table
Author :
Karita, M. ; Kyutoku, S. ; Nakagawa, H. ; Maeda, M.
Author_Institution :
Shinki Electric Co., Ltd.
Keywords :
Hydraulic actuators;
Conference_Titel :
Magnetics Conference, 1990. Digests of INTERMAG '90. International
Conference_Location :
Brighton, UK
DOI :
10.1109/INTMAG.1990.734832
