Title :
Designing of microelectromechanical structures for built-in systems using CAD tools
Author_Institution :
CAD/CAM Dept., Lviv Polytech. Nat. Univ., Ukraine
Abstract :
This paper present few approaches to modeling and simulation of micro-electromechanical structures using CFDRC software and VHDL-AMS language.
Keywords :
CAD; computational fluid dynamics; data visualisation; hardware description languages; microfluidics; micromechanical devices; semiconductor device models; software tools; 3D visualization; CAD tools; CFD ACE; CFDRC software; VHDL-AMS; microelectromechanical structures; modeling; simulation; software package; three-dimensional model; Application software; Circuit simulation; Circuit topology; Computational fluid dynamics; Design automation; Filters; Integrated circuit modeling; Microelectromechanical systems; Micromechanical devices; Software packages;
Conference_Titel :
CAD Systems in Microelectronics, 2003. CADSM 2003. Proceedings of the 7th International Conference. The Experience of Designing and Application of
Print_ISBN :
966-553-278-2
DOI :
10.1109/CADSM.2003.1254988
