Title :
Design and simulation of a 2-axis low g acceleration switch with multi-folded beams
Author :
Luxing Lin ; Qiancheng Zhao ; Zhenchuan Yang ; Dacheng Zhang ; Guizhen Yan
Author_Institution :
Nat. Key Lab. of Sci. & Technol. on Micro/Nano Fabrication, Peking Univ., Beijing, China
Abstract :
A 2-axis low G acceleration threshold switch with multi-folded beams and buffering springs is presented in this paper. The multi-folded beams at four corners which anchored on the substrate permit the proof-mass move in both X and Y axis. The buffering springs contact the proof-mass and one electrode aiming at extending the contact time when the switch is latched while protecting the switch against severe shock damage from intensive impact of the switch. The threshold acceleration of the switch is designed as 60G and will be fabricated by a two-mask silicon-on-glass process.
Keywords :
electric shocks; electrical contacts; electrodes; electronic engineering computing; flip-flops; masks; springs (mechanical); switches; 2-axis low G acceleration threshold switch; X axis; Y axis; buffering spring contact; electrode; latching; multifolded beam; proof-mass move; shock damage; two-mask silicon-on-glass process; Abstracts; Acceleration; Fabrication; Frequency control; Silicon; Springs; Switches;
Conference_Titel :
Solid-State and Integrated Circuit Technology (ICSICT), 2014 12th IEEE International Conference on
Conference_Location :
Guilin
Print_ISBN :
978-1-4799-3296-2
DOI :
10.1109/ICSICT.2014.7021682
