DocumentCode
2425216
Title
A method of dynamic analysis for accelerometer base on separated time and space
Author
Zhang, Pengpeng ; Zhao, Xin ; Lu, Guizhang ; Liu, Ningxia
Author_Institution
Inst. of Robot. & Autom. Inf. Syst., Nankai Univ., Tianjin, China
fYear
2010
fDate
20-23 Jan. 2010
Firstpage
924
Lastpage
927
Abstract
The virtual operation for MEMS device is a key issue in the design and simulation of MEMS system. Compared with traditional finite element method, we put forward a method of dynamic analysis base on separated time and space. For accelerometer´s cantilever dynamic analysis, the movement process of cantilever is the result of the law of movement multiplied by the steady state value of cantilever. Comparing with the result of dynamic analysis of cantilever used by ANSYS, it has confirmed the validity of method of separated time and space for dynamic analysis.
Keywords
accelerometers; cantilevers; finite element analysis; MEMS device; accelerometer; cantilever dynamic analysis; Accelerometer; Dynamic analysis; MEMS; Method of separated time and space;
fLanguage
English
Publisher
ieee
Conference_Titel
Nano/Micro Engineered and Molecular Systems (NEMS), 2010 5th IEEE International Conference on
Conference_Location
Xiamen
Print_ISBN
978-1-4244-6543-9
Type
conf
DOI
10.1109/NEMS.2010.5592115
Filename
5592115
Link To Document