DocumentCode
2425460
Title
Investigation based on MEMS double Si3N4 resonant beams pressure sensor
Author
Chuan, Yang ; Can, Guo
Author_Institution
State Key Lab. of Mech. Manuf. Syst., Xi´´an, China
fYear
2010
fDate
20-23 Jan. 2010
Firstpage
5
Lastpage
8
Abstract
A type of MEMS double Si3N4 resonant beams pressure sensor is presented in this paper. The maths models are established in allusion to the Si3N4 resonant beams and pressure sensitive diaphragm. Based on the maths model of Si3N4 resonant beams, the relation between the resonant frequency and key dimension of Si3N4 resonant beams is analyzed theoretically by the vibration differential equation, at the same time, the simulation is done by the finite element analysis software ANSYS10.0 and the results show good agreement with the theory. At the last, The microfabrication craftwork is designed.
Keywords
finite element analysis; microfabrication; micromechanical resonators; pressure sensors; silicon compounds; MEMS double resonant beams pressure sensor; finite element analysis; microfabrication craftwork; pressure sensitive diaphragm; MEMS; Si3N4; optimization; pressure diaphragm;
fLanguage
English
Publisher
ieee
Conference_Titel
Nano/Micro Engineered and Molecular Systems (NEMS), 2010 5th IEEE International Conference on
Conference_Location
Xiamen
Print_ISBN
978-1-4244-6543-9
Type
conf
DOI
10.1109/NEMS.2010.5592125
Filename
5592125
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