DocumentCode
2425605
Title
State-of-the-Art in Microfabrication of SAW Devices
Author
Budreau, Alan J. ; Kearns, William J. ; Carr, Paul H.
fYear
1975
fDate
1975
Firstpage
458
Lastpage
462
Keywords
Electron beams; Electron optics; Frequency; Optical device fabrication; Optical imaging; Optical microscopy; Printing; Surface acoustic wave devices; Surface acoustic waves; Transducers;
fLanguage
English
Publisher
ieee
Conference_Titel
1975 Ultrasonics Symposium
Type
conf
DOI
10.1109/ULTSYM.1975.196560
Filename
1533500
Link To Document