Title :
State-of-the-Art in Microfabrication of SAW Devices
Author :
Budreau, Alan J. ; Kearns, William J. ; Carr, Paul H.
Keywords :
Electron beams; Electron optics; Frequency; Optical device fabrication; Optical imaging; Optical microscopy; Printing; Surface acoustic wave devices; Surface acoustic waves; Transducers;
Conference_Titel :
1975 Ultrasonics Symposium
DOI :
10.1109/ULTSYM.1975.196560
