Title :
Structure design on MEMS TiN resonant pressure sensors
Author :
Chuan, Yang ; Can, Guo
Author_Institution :
State Key Lab. of Mech. Manuf. Syst., Xi´´an, China
Abstract :
A structure of TiN double resonant beams pressure sensor is presented, the pressure is measured through the relation between the resonant frequency of TiN resonant beams and the measured pressure. In this paper, the maths model of sensitive structures of the resonant sensor is established, through the analysis and numeration from the theory, and simulation by the ANSYS software, the varied extension of the length and the optimization of the beams are educed and the optimal position of the TiN resonant beam on the pressure membrane is confirmed.
Keywords :
microsensors; pressure measurement; pressure sensors; titanium compounds; ANSYS software; MEMS resonant pressure sensor; TiN; double resonant beam pressure sensor; pressure measurement; pressure membrane; resonant frequency; structure design; Optimized parameter; TiN; finite element analysis; pressure sensor; resonant;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2010 5th IEEE International Conference on
Conference_Location :
Xiamen
Print_ISBN :
978-1-4244-6543-9
DOI :
10.1109/NEMS.2010.5592131
