DocumentCode
2425959
Title
Acoustic Waveguide Fabrication by Orientation Dependent Etching
Author
Wagers, Robert S. ; Weirauch, Donald F.
fYear
1975
fDate
1975
Firstpage
539
Lastpage
543
Keywords
Acoustic waveguides; Acoustic waves; Electromagnetic waveguides; Etching; Optical device fabrication; Optical surface waves; Optical waveguides; Rough surfaces; Surface acoustic waves; Surface roughness;
fLanguage
English
Publisher
ieee
Conference_Titel
1975 Ultrasonics Symposium
Type
conf
DOI
10.1109/ULTSYM.1975.196581
Filename
1533521
Link To Document