Title :
Acoustic Waveguide Fabrication by Orientation Dependent Etching
Author :
Wagers, Robert S. ; Weirauch, Donald F.
Keywords :
Acoustic waveguides; Acoustic waves; Electromagnetic waveguides; Etching; Optical device fabrication; Optical surface waves; Optical waveguides; Rough surfaces; Surface acoustic waves; Surface roughness;
Conference_Titel :
1975 Ultrasonics Symposium
DOI :
10.1109/ULTSYM.1975.196581