DocumentCode :
2425959
Title :
Acoustic Waveguide Fabrication by Orientation Dependent Etching
Author :
Wagers, Robert S. ; Weirauch, Donald F.
fYear :
1975
fDate :
1975
Firstpage :
539
Lastpage :
543
Keywords :
Acoustic waveguides; Acoustic waves; Electromagnetic waveguides; Etching; Optical device fabrication; Optical surface waves; Optical waveguides; Rough surfaces; Surface acoustic waves; Surface roughness;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
1975 Ultrasonics Symposium
Type :
conf
DOI :
10.1109/ULTSYM.1975.196581
Filename :
1533521
Link To Document :
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