Cause of data retention loss in a nitride-based localized trapping storage flash memory cell

Data retention loss in a localized trapping storage flash memory cell with a SONOS type structure is investigated. Both charge loss through the bottom oxide and lateral migration of trapped charges in the nitride layer are considered for the data retention loss. Charge pumping and charge separation methods are used in this study. Our results reveal that in normal operation condition the retention loss is mainly caused by charge leakage via P/E stress created oxide traps.