Modeling of a bistable MEMS mechanism with torsion/cantilever beams

A mechanical modeling of a novel bistable MEMS mechanism with a torsion/cantilever beam system is presented in this paper. The model includes mathematical solution to the system equivalent stiffness, and simulating analysis for the deformation under load. Meanwhile, the geometrical parameters of bistable system were optimized with Matlab software. And the optimization dimensions involves the length, width and thickness where l₁=1130μm, w₁=100μm, t₁=10μm for cantilever, and l₂=500μm, w₂=20μm, t₂=10μm for torsional flexure, respectively. In addition, modal analysis was performed to determine the nature frequency of the torsion/cantilever beam system. The first four fundamental resonant modes consist of torsional, out-of-plane sliding, in-plane sliding and out-of-plane rocking mode. This proposed bistable mechanism can be suitable for bistable switching relay applications where low power consumption is requested.