DocumentCode
2426640
Title
Nano-mechanical behavior of low temperature electroplated nano-crystalline Ni films
Author
Chung, C.K. ; Chang, W.T.
Author_Institution
Dept. of Mech. Eng., Nat. Cheng Kung Univ., Tainan, Taiwan
fYear
2010
fDate
20-23 Jan. 2010
Firstpage
203
Lastpage
206
Abstract
Conventional electroplated Ni films were performed at high temperatures of 45-50°C. In this paper, we have studied the low temperature electroplating i.e. low temperature electroplating of nano-crystalline Ni films and their nano-mechanical property. The deposits were electroplated in potentiostatic mode and the low electrolytic temperature varied from 0 to 20 °C. Grazing incidence X-ray diffractometer was used to examine the polycrystalline phase characteristics and grain size. MTS Nano Indenter with continuous stiffness measurement (CSM) module and Berkovich indenter were employed to characterize the nano-mechanical property of deposits. The experimental results showed that hardness increased with decreasing electrolytic temperature. It might be attributed to the residual compressive stress. Therefore, low temperature electroplating is favorable for the enhancement of Ni deposits hardness.
Keywords
X-ray diffraction; compressive strength; elastic constants; electrolytes; electroplating; grain size; hardness; high-temperature effects; internal stresses; metallic thin films; nanoindentation; nanostructured materials; nickel; Berkovich indenter; MTS nanoindenter; Ni; continuous stiffness measurement module; grain size; grazing incidence X-ray diffractometer; hardness; high temperature effect; low electrolytic temperature; low temperature electroplated nanocrystalline films; nanomechanical behavior; polycrystalline phase; potentiostatic mode; residual compressive stress; temperature 0 degC to 20 degC; temperature 45 degC to 50 degC; Electroplating; Low temperature; Nano-identation; Nickel;
fLanguage
English
Publisher
ieee
Conference_Titel
Nano/Micro Engineered and Molecular Systems (NEMS), 2010 5th IEEE International Conference on
Conference_Location
Xiamen
Print_ISBN
978-1-4244-6543-9
Type
conf
DOI
10.1109/NEMS.2010.5592186
Filename
5592186
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