Title :
Parylene-coated NMOSFET-embedded cantilevers for surface stress sensing in liquid environment
Author :
Wang, J. ; Huang, Y. ; Wu, W.G. ; Hao, Y.L.
Author_Institution :
Nat. Key Lab. of Sci. & Technol. on Micro/Nano Fabrication, Peking Univ., Beijing, China
Abstract :
This paper reports a parylene-coated nMOSFET (n-type metal-oxide-semiconductor field-effect transistor)-embedded cantilever, which is suitable for the detection of chemical or biological molecules in liquid phase based on the surface stress sensing principle. The silicon cantilevers are configured along <;110> direction, and the channels of the embedded-nMOSFETs are perpendicular to the cantilevers. The fabrication process based upon POST-CMOS (complementary MOS) technology for making these devices on silicon-on-insulator (SOI) wafers is reported. The functionality of the sensor is preliminarily proven by the detection of 1-octanethiol in absolute ethanol.
Keywords :
MOSFET; cantilevers; chemical variables measurement; liquids; microfabrication; microsensors; silicon-on-insulator; stress measurement; POST-CMOS; Parylene-coated NMOSFET; biological molecule detection; chemical molecule detection; fabrication process; liquid environment; sensor; silicon cantilevers; silicon-on-insulator; surface stress sensing; Cantilever; Liquid environment; NMOSFET; Surface stress;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2010 5th IEEE International Conference on
Conference_Location :
Xiamen
Print_ISBN :
978-1-4244-6543-9
DOI :
10.1109/NEMS.2010.5592202
