Fabrication of micropattern grating platform for sensing bio-molecule interaction

Device consisting of a micro-pattern grating structure with membrane of alternating dielectric materials such as SiO₂, Si₃N₄ and SOG or ITO, is fabricated. Its utilization as a platform for attaching active silane layer such as APTES, further as a sensor after immobilizing of sensing molecules and hybridizing with complimentary molecules is demonstrated. Shifting in peak wavelength is observed when new layer is introduced onto the platform.