Title :
Application of CAD tools for design and simulation of capacitive microaccelerometers
Author :
Szaniawski, Krzysztof ; Podsiadly, Piotr ; Napieralski, Andrzej
Author_Institution :
Dept. of Microelectron. & Comput. Sci., Tech. Univ. Lodz, Poland
Abstract :
This paper demonstrates, how CAD design and simulation tools can assist in developing MEMS devices in general, and capacitive accelerometers in particular. Two types of surface-micromachined accelerometers are presented and described. The advantages and disadvantages of particular tools are discussed. The paper also includes sample simulation results, which prove that virtual simulations can provide the designer a lot of information with no need for device fabrication and measurements.
Keywords :
accelerometers; capacitive sensors; circuit CAD; integrated circuit modelling; microsensors; CAD modeling; CAD tools; MEMS devices; capacitive microaccelerometers; surface-micromachined accelerometers; Acceleration; Accelerometers; Actuators; Capacitive sensors; Circuit simulation; Computational modeling; Design automation; Fabrication; Integrated circuit modeling; Micromechanical devices;
Conference_Titel :
CAD Systems in Microelectronics, 2003. CADSM 2003. Proceedings of the 7th International Conference. The Experience of Designing and Application of
Print_ISBN :
966-553-278-2
DOI :
10.1109/CADSM.2003.1255084
