DocumentCode
2427037
Title
Application of CAD tools for design and simulation of capacitive microaccelerometers
Author
Szaniawski, Krzysztof ; Podsiadly, Piotr ; Napieralski, Andrzej
Author_Institution
Dept. of Microelectron. & Comput. Sci., Tech. Univ. Lodz, Poland
fYear
2003
fDate
18-22 Feb. 2003
Firstpage
337
Lastpage
340
Abstract
This paper demonstrates, how CAD design and simulation tools can assist in developing MEMS devices in general, and capacitive accelerometers in particular. Two types of surface-micromachined accelerometers are presented and described. The advantages and disadvantages of particular tools are discussed. The paper also includes sample simulation results, which prove that virtual simulations can provide the designer a lot of information with no need for device fabrication and measurements.
Keywords
accelerometers; capacitive sensors; circuit CAD; integrated circuit modelling; microsensors; CAD modeling; CAD tools; MEMS devices; capacitive microaccelerometers; surface-micromachined accelerometers; Acceleration; Accelerometers; Actuators; Capacitive sensors; Circuit simulation; Computational modeling; Design automation; Fabrication; Integrated circuit modeling; Micromechanical devices;
fLanguage
English
Publisher
ieee
Conference_Titel
CAD Systems in Microelectronics, 2003. CADSM 2003. Proceedings of the 7th International Conference. The Experience of Designing and Application of
Print_ISBN
966-553-278-2
Type
conf
DOI
10.1109/CADSM.2003.1255084
Filename
1255084
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