Analytical modelling and simulations of a MEMS micro-mirror - MATLAB implementation

Author

Cichalewski, Wojciech ; Napieralski, Andrzej ; Camon, Henri ; Estibals, Bruno

Author_Institution

Dept. of Microelectron. & Comput. Sci., Tech. Univ. Lodz, Poland

fYear

2003

fDate

18-22 Feb. 2003

Firstpage

360

Lastpage

365

Abstract

This paper is devoted to the study of the static and dynamical behaviour of a ID torsion single crystal silicon micro-mirror. The aim is to create a parametric model of such mirror allowing to use a simple calculation program to avoid expensive and long FEM simulations. This study tries to put in place a modelling to define the best structure with regard to various specification by taking into account the technological possibilities and to simulate the experimental characteristics before the expensive technological process.

Keywords

Runge-Kutta methods; damping; electrostatic actuators; micromirrors; optical design techniques; optical engineering computing; physics computing; silicon; torque; torsion; transient response; 1D torsion mirror; MATLAB implementation; MEMS micromirror; Runge-Kutta method; angular acceleration; damping coefficient; dynamical behaviour; electrostatic mirror; inclined electrodes; mirror actuation; parametric model; planar electrodes; resonant frequency; single crystal micromirror; static behaviour; steady-state behaviour; torque; transient response; Analytical models; Electrodes; Electrostatics; MATLAB; Mathematical model; Micromechanical devices; Mirrors; Silicon; Torque; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

CAD Systems in Microelectronics, 2003. CADSM 2003. Proceedings of the 7th International Conference. The Experience of Designing and Application of

Print_ISBN

966-553-278-2

Type

conf

DOI

10.1109/CADSM.2003.1255091

Filename

1255091