Research on Virtual Integrated Simulation Developing Platform for PECVD

Plasma enhanced chemical vapor deposition (PECVD) play a key role in manufacturing solar cells. It is a very difficult task to design new PECVD equipment, which can adapt to different factories and varied requirements. This paper introduces and analyses the system theory of virtual integrated simulation development platform (VISDP) for PECVD. Since traditional designing methods became hard to meet enterprises´ requirements, many commercial software, such as design software (UG), project analysis software (FLUENT) and virtual reality software (Open Inventor) come forth to be used to solve this problem. Unfortunately, the aforementioned software products have shortcomings respectively. The goal of our research group is to establish a VISDP based on redeveloping technologies to CAx (UG and FLUENT). The platform supports three simulation systems, virtual assembly simulation system, process simulation system and project analysis visualization system. Finally, the implementation of in-line PECVD System (ILPECVDSlO-1) is presented, which verifies that the engine mechanism of Open Inventor is feasible and efficient. The simulation results will direct the design of product structure and process.