DocumentCode
2427152
Title
Framework of MEMS high accelerated stress test
Author
Wang, Zhen ; Xu, Lixin ; Wang, Zhao ; Zhao, Heming ; Song, Rongchang ; Lou, Wenzhong
Author_Institution
Nat. Key Lab. of Mechatron. Eng. & Control, Beijing Inst. of Technol., Beijing, China
fYear
2010
fDate
20-23 Jan. 2010
Firstpage
280
Lastpage
283
Abstract
Given the reliability principles and failure mechanism of MEMS, this paper discussed the accelerated test from three aspects as follows: the connotation of the test including concept and meaning; the scope of application concerned with product levels for applicants in types of stress; test process includes the test objective determination, test stressing selection, the test profile designing, the implementation scheme determining, analysis and improvement measures.
Keywords
failure analysis; micromechanical devices; reliability; stress analysis; MEMS; failure mechanism; reliability principle; test objective determination; test profile designing; test stressing selection; HAST; MEMS; reliability;
fLanguage
English
Publisher
ieee
Conference_Titel
Nano/Micro Engineered and Molecular Systems (NEMS), 2010 5th IEEE International Conference on
Conference_Location
Xiamen
Print_ISBN
978-1-4244-6543-9
Type
conf
DOI
10.1109/NEMS.2010.5592211
Filename
5592211
Link To Document