A novel photoreceiver array with near field resolution capability [for ultrahigh-density storage]

Author

Seshadri, B. ; Tang, J. ; Chyr, I. ; Steckl, A.J. ; Beyette, F.R., Jr.

Author_Institution

Dept. of Electr. Comput. Eng. & Comput. Sci., Cincinnati Univ., OH, USA

fYear

2000

fDate

24-28 July 2000

Abstract

A photoreceiver array is presented that exploits the features of near field optics to provide sub-nanometer spatial resolution. Comprised of a photonic CMOS photoreceiver chip and a MEMS based aperture array, the near-field photoreceiver array is implemented using standard fabrication techniques.

Keywords

CMOS integrated circuits; integrated optoelectronics; micro-optics; micromachining; optical receivers; optical storage; phototransistors; FIB milling; MEMS based aperture array; anisotropic etching; data detection; evanescent waves; micromachining; near field optics; near field resolution capability; photodetector; photonic CMOS photoreceiver chip; photoreceiver array; phototransistor; subnanometer spatial resolution; thresholding circuit; ultrahigh density storage; Anisotropic magnetoresistance; Apertures; Circuits; Etching; Fabrication; Optical arrays; Optical sensors; Packaging; Silicon; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronic-Enhanced Optics, Optical Sensing in Semiconductor Manufacturing, Electro-Optics in Space, Broadband Optical Networks, 2000. Digest of the LEOS Summer Topical Meetings

Conference_Location

Aventura, FL, USA

ISSN

1099-4742

Print_ISBN

0-7803-6252-7

Type

conf

DOI

10.1109/LEOSST.2000.869698

Filename

869698