Title :
Silicon field emission electron beam sources
Author :
Palmer, Dan ; Shaw, J. ; Gray, H. ; Mancusi, J. ; McGuire, G.E. ; Ball, C. ; Temple, D. ; Vellenga, D. ; Yadon, L. ; True, R. ; Hargreaves, T. ; Symons, R. ; Joines, W.
Author_Institution :
Electron. Technol. Div., MCNC, Research Triangle Park, NC, USA
Abstract :
Summary form only given. This presentation will describe several fabrication methods developed at MCNC for silicon column emitters. Micrographs of the completed structures and arrays will be included. In addition, equipment and methods for electrical characterization of these arrays will be described, and the latest test results will be shown.
Keywords :
electron beams; electron field emission; electron sources; elemental semiconductors; silicon; vacuum microelectronics; Si; arrays; electrical characteristics; fabrication; field emission electron beam sources; micrographs; silicon column emitters; Electron beams; Fabrication; Field emitter arrays; Insulation; Joining materials; Plasma applications; Plasma density; Plasma measurements; Silicon; Voltage;
Conference_Titel :
Plasma Science, 1995. IEEE Conference Record - Abstracts., 1995 IEEE International Conference on
Conference_Location :
Madison, WI, USA
Print_ISBN :
0-7803-2669-5
DOI :
10.1109/PLASMA.1995.533527
