DocumentCode
2427486
Title
Trace moisture detection in corrosive gases using quadrupole mass spectroscopy
Author
Funke, H. ; Raynor, M. ; Houlding, V. ; Ramus, T. ; Hein, S. ; Kirk, R.
Author_Institution
Adv. Technol. Center, Matheson, Tri-Gas, USA
fYear
2000
fDate
24-28 July 2000
Abstract
An online analyzer for impurities in corrosive gases was developed using an HP-5973 MSD quadrupole mass selective detector equipped with customized data acquisition and gas sample inlet. The instrument was evaluated for its ability to quantitatively analyze moisture and other impurities at the ppm level in HCl.
Keywords
mass spectroscopic chemical analysis; mass spectroscopy; moisture measurement; corrosive gases; impurities; online analyzer; quadrupole mass selective detector; quadrupole mass spectroscopy; quantitative analysis; trace moisture detection; Gases; Human computer interaction; Impurities; Instruments; Iron; Mass spectroscopy; Moisture; Orifices; Page description languages; Valves;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronic-Enhanced Optics, Optical Sensing in Semiconductor Manufacturing, Electro-Optics in Space, Broadband Optical Networks, 2000. Digest of the LEOS Summer Topical Meetings
Conference_Location
Aventura, FL, USA
ISSN
1099-4742
Print_ISBN
0-7803-6252-7
Type
conf
DOI
10.1109/LEOSST.2000.869711
Filename
869711
Link To Document