Title :
Study of Ion Implanted Silicon Surface Using Acoustoelectric Voltage
Author :
Motamedi, M.E. ; Das, P. ; Bharat, R.
Keywords :
Attenuation; Current measurement; Delay lines; Density measurement; Silicon; Substrates; Surface acoustic wave devices; Surface acoustic waves; Surface treatment; Voltage;
Conference_Titel :
1976 Ultrasonics Symposium
DOI :
10.1109/ULTSYM.1976.196666
